Fluence (10^15 ions cm^-2)	Mg Concentration (%)	Error in Mg Concentration
0.432	16.6	1
0.864	17.5	1.1
2.22	15.9	0.98
7.77	11.3	0.7
25.9	11.1	0.69
82.9	10.4	0.65
104	12.8	0.79
311	10	0.62
